Performance Limits of a Micromachined Tunable-Cavity Filter

This paper focuses on the performance limits of a tunable-cavity Fabry-Perot filter (FPF) implemented using MEMS technology. This is a versatile device capable of many functions, including light modulation and high precision sensing. Our goal is to explore challenges and opportunities in implementing tunable-cavity filter using MEMS technology. Thermal stability and effects of fabrication imperfections are studied. Based on coupledfield modeling analysis, it is concluded that the device is extremely sensitive to thermal fluctuations and fabrication imperfections degrading performance significantly. It is emphasized that if these challenges are appropriately addressed, the device will be a low cost alternative to existing DWDM filters and variety of precision sensors.